Particle and fluid simulations in single- and dual-frequency
capacitive discharges

H. C. Kim (Dept. NE, UC-Berkeley)

This presentation includes three issues in capacitive rf
discharges. One is the comparison of PIC simulation results with
Godyak's experimental data in a single-frequency capacitive discharge.
They are in a good agreement when a large number of superparticles is
used. The other is the comparison between PIC and fluid simulations in
a single-frequency capacitive discharge. For two different pressures,
the trend of the spatial profiles of the plasma density, electron
temperature, and electron power consumption shows a significant
discrepancy in PIC and fluid simulation results. Another is several
kinds of effective frequencies in a dual-frequency capacitive
discharge. Their deviation from original frequencies indicates that
the electron nonlocality plays an important role in the discharge.